Characterization of a Piezo-Resistive MEMS Microphone for Aero-Acoustic Measurements

This paper presents the packaging and characterization of a piezo-resistive (PR) micro-electro-mechanical system (MEMS) microphone for aero-acoustic measurements with three different mem-brane sizes. The thickness of the square membranes is 5 μm with an edge length of 1900 μm, 2260 μm and 2660 μm, respectively. The results of the sensors characterization show a sensitivity of up to 55 dB re 1 V/Pa when exposed to an acoustic chirp signal ranging from 5-50 kHz at 70-100 dB SPL. This paper presents a test approach necessary for chips with very thin membrane and the results of a dynamic pressure frequency response test.