A Physics-Based Interpolation Method for Rapid Dimensioning of pMUT Designs

In this paper, we present an interpolation method based on analytical physics-based equations aimed towards rapid prototyping of fluid-operated piezoelectrical micromachined ultrasonic transducers (pMUTs). The method allows for the definition of design variants, whose natural frequencies match the targeted operating frequency, within a predefined geometrical parameter range. Among those designs, an optimal design w.r.t the largest transmitting sensitivity can be determined. Comparison between FEM simulations and interpolation results shows a maximum relative error of 2.96% for the resonant frequency matching. Due to generic and physicsbased concept, this methodology is easily transferable to the target-based optimization of any arbitrary pMUT geometry and operating media.