2019
Presentation
Title

Resistless Ga+ beam lithography for flexible prototyping of nanostructures

Title Supplement
Presentation held at 16th Vacuum Nanoelectronics Symposium, February 28th - March 1st, 2019, Tokyo, Japan
Author(s)
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)