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2018
Poster
Title
Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects
Title Supplement
Poster presented at ECSCRM 2018, 12th European Conference on Silicon Carbide & Related Materials, September 2-6, 2018, Birmingham, UK
Author(s)
Xu, Zongwei
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China
Song, Y.
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China
Liu, T.
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China
He, Z.D.
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China
Wang, H.
State Key Laboratory of Separation Membranes and Membrane Processes, Tianjin Polytechnic University, China
Yao, B.T.
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China
Liu, L.
State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, China