2014
Presentation
Title

Nanoscale characterization of high-k dielectrics by electrical SPM methods

Title Supplement
Presentation held at Novel High k Application Workshop, March 24, 2014, Dresden
Author(s)
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English