CMOS integrated free standing circular membrane for the detection of allergens and biomarkers

A simple and cost-effective marker free monolithic integrated biosensor is developed within the Euregio project Unihealth. The sensor system is intended for an everyday use or for application in medical and fundamental research in the area of food allergies. The typical mass of allergens is in the range of 20 kDa and 80 kDa. For the label free detection of allergens a mass sensor with micro and nanostructures is a promising detection principle. In this work we report on experimental results of membrane structures that have been realized with a CMOS compatible pressure sensor technology. The sensor element consists essentially of a free standing membrane, which is electrostatically actuated to an oscillation with a resonance frequency of about 4 MHz and a mass sensitivity of about 120 Hz/pg.