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Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films
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2006
Conference Paper
Title
Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films
Author(s)
Fried, M.
Petrik, P.
Horvath, Z.E.
Lohner, T.
Schmidt, C.
Schneider, C.
Ryssel, H.
Mainwork
E-MRS 2005 Spring Meeting. Symposium P: Current trends in optical and X-ray metrology of advanced materials for nanoscale devices. Proceedings
Conference
Symposium P "Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices 2005
European Materials Research Society (Spring Meeting) 2005
DOI
10.1016/j.apsusc.2006.06.009
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB