Title

E-MRS 2005 Spring Meeting. Symposium P: Current trends in optical and X-ray metrology of advanced materials for nanoscale devices. Proceedings

Title Supplement

Strasbourg, France, 31 May-03 June 2005

Person Involved

Corporate Author

European Materials Research Society -EMRS-

Publisher

Publishing Place

Amsterdam

Publication Date

2006

Series

Applied surface science; 253.2006, Nr.1

Conference