Strength analysis of etched silicon pressure sensors

The strength of relative pressure sensors are experimentally and numerically investigated. The sensors are produced with different eching processes and have different sizes because of different working pressure. The etching procedures create special geometries of membranes, around, clamped one (ECE) and a rectangular, clamped membrane with sharp notches (KOH). The paper compares the strength of different sensors and mechanical approaches that can be applied to predict the membrane strength.