2005
Conference Proceeding
Title

Micro System Technologies 2005

Title Supplement
Micro Electro, Opto, Mechanical Systems & Components International Conference & Exhibition, October 5-6, 2005, Munich, Germany
Person Involved
Reichl, H.
Corporate Author
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
Publisher
Publishing Place
Poing
Conference
Language
English