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  4. Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)
 
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2004
Conference Paper
Title

Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)

Author(s)
Braun, S.
Bendjus, B.
Foltyn, T.
Menzel, M.
Schreiber, J.
Leson, A.
Mainwork
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II  
Conference
Conference "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications" 2004  
DOI
10.1117/12.560358
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
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