Title

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II

Title Supplement

5 August 2004, Denver, Colorado, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2004

Series

Proceedings of SPIE; 5533

ISBN

0-8194-5471-0

Conference