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Polymer BioMEMs with integrated optical and fluidic functionality
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2003
Conference Paper
Title
Polymer BioMEMs with integrated optical and fluidic functionality
Author(s)
Windhorn, K.
Meixner, L.
Drost, S.
Schröder, H.
Kilgus, E.
Scheel, W.
Ebling, F.
Otto, Thomas
Küchler, Matthias
Nestler, J.
Geßner, Thomas
Mainwork
Micro System Technologies 2003
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2003
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS