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Title
Micro System Technologies 2003
Title Supplement
International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components, München, October 7-8, 2003
Person Involved
Corporate Author
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
MESAGO Messe Frankfurt GmbH, Stuttgart
Publisher
Publishing Place
Poing
Publication Date
2003
ISBN
3-7723-7020-9