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Fabrication of microrelief surfaces using a one-step lithography process
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1997
Conference Paper
Titel
Fabrication of microrelief surfaces using a one-step lithography process
Author(s)
Reimer, K.
Hofmann, U.
Jürss, M.
Pilz, W.
Quenzer, H.J.
Wagner, B.
Hauptwerk
Microelectronic structures and MEMS for optical processing III
Konferenz
Conference "Microelectronic Structures and MEMS for Optical Processing" 1997
DOI
10.1117/12.284557
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT
