Title

Microelectronic structures and MEMS for optical processing III

Title Supplement

29-30 September 1997, Austin/Texas

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1997

Series

Proceedings of SPIE; 3226

ISBN

0-8194-2658-X

Conference