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Dimensional stability of substrate films: An essential requirement for the deposition of functional layers?
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2016
Zeitschriftenaufsatz
Titel
Dimensional stability of substrate films: An essential requirement for the deposition of functional layers?
Author(s)
Miesbauer, Oliver
Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV
Noller, Klaus
Fraunhofer-Institut für Verfahrenstechnik und Verpackung IVV
Zeitschrift
Converting Quarterly
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Language
Englisch
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