Closed-loop control driver for quasi-static MOEMS mirrors

In this paper we present a driven for accurate positioning of certain electrostatically driven micro-opto-electromechanical systems (MOEMS). The driver unit can control up to six quasi-static mirror axes using closed loop control. The electronics are described in this contribution together with different closed-loop control algorithms, wich were implemented for fast and accurate positioning. Results from closed loop operations are compared to the characteristics of the devices when driven in open loop mode. Settlings times and operation bandwidth can be improved by a factor of up 40.