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Title
MOEMS and Miniaturized Systems XII
Title Supplement
2.-7.2.2013, San Francisco, CA, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2013
Series
Proceedings of SPIE; 8616
ISBN
978-0-8194-9385-9