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Characterisation of oxide-CMP slurries with fumed-silica abrasive particles modified by wet-jet miling
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2004
Conference Paper
Title
Characterisation of oxide-CMP slurries with fumed-silica abrasive particles modified by wet-jet miling
Author(s)
Zwicker, G.
Jacobsen, H.
Lortz, W.
Stachowiak, E.
Brandes, R.
Mainwork
Ninth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2004. Proceedings
Conference
International Chemical Mechanical Planarization for ULSI Multilevel Interconnection Conference (CMP-MIC) 2004
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
