Title

Ninth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2004. Proceedings

Title Supplement

February 24 - 26, 2004, Marriott Hotel, Marina del Rey, CA

Corporate Author

Institute for Microelectronics InterConnection -IMIC-, Tampa, Fla.

Publisher

Publishing Place

Tampa, Fla.

Publication Date

2004

Conference