2008
Conference Paper
Title

CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models

Abstract
Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given.
Author(s)
Velasco-Velez, J.J.
Doll, T.
Chaiyboun, A.
Wilbertz, C.
Wöllenstein, J.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Bauersfeld, M.-L.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
Conference
Open Access
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Use according to copyright law
DOI
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Language
English
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