• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Mechanical characterization and micro structure diagnostics of glass frit bonded interfaces
 
  • Details
  • Full
Options
2008
Conference Paper
Title

Mechanical characterization and micro structure diagnostics of glass frit bonded interfaces

Abstract
In this paper, results of mechanical strength investigations for glass frit bonded components using tensile and micro chevron testing are presented. Specific attention is given to the formation of lead precipitates close to the glass-silicon interface which affects the strength properties and form reliability risks. Results of the accompanying SEM and TEM investigations suggest that the lead precipitation can be understood in terms of a redox reaction involving the oxidation of the Si wafer and can be reduced by appropriate intermediate layers forming a barrier between glass and silicon.
Author(s)
Boettge, B.
Dresbach, C.
Graff, A.
Petzold, M.
Bagdahn, J.
Mainwork
Semiconductor Wafer Bonding 10. Science, Technology, and Applications  
Conference
International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications 2008  
Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME) 2008  
Electrochemical Society (Meeting) 2008  
Electrochemical Society of Japan (Fall Meeting) 2008  
DOI
10.1149/1.2982898
Language
English
IWM-H  
Keyword(s)
  • wafer bonding

  • seal glass bonding

  • strength

  • lead precipitation

  • barrier formation

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024