• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Particle tolerance of micro diaphragm pumps with low chamber heights and passive flap valves
 
  • Details
  • Full
Options
2015
Conference Paper
Title

Particle tolerance of micro diaphragm pumps with low chamber heights and passive flap valves

Other Title
Partikeltoleranz von Mikromembranpumpen mit geringer Kammerhöhe und passiven Klappenventilen
Author(s)
Jenke, C.W.
Muster, T.
Richter, M.
Kutter, C.
Mainwork
MEMS, Mikroelemente, Systeme. Proceedings CD-ROM  
Conference
MikroSystemTechnik Kongress 2015  
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024