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Particle tolerance of micro diaphragm pumps with low chamber heights and passive flap valves
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2015
Conference Paper
Title
Particle tolerance of micro diaphragm pumps with low chamber heights and passive flap valves
Other Title
Partikeltoleranz von Mikromembranpumpen mit geringer Kammerhöhe und passiven Klappenventilen
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Author(s)
Jenke, C.W.
Muster, T.
Richter, M.
Kutter, C.
Mainwork
MEMS, Mikroelemente, Systeme. Proceedings CD-ROM
Conference
MikroSystemTechnik Kongress 2015
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT