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Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes
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2013
Conference Paper
Title
Wafer-level technology for piezoresistive electro-mechanical transducer based on Carbon Nanotubes
Author(s)
Shaporin, Alexey
Hermann, Sascha
Kaufmann, C.
Schulz, Stefan E.
Geßner, Thomas
Voigt, Sven
Mehner, J.
Hartmann, Susanne
Wunderle, Bernhard
Bonitz, Jens
Mainwork
Smart Systems Integration 2013. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2013
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
