Title

Smart Systems Integration 2013. CD-ROM

Title Supplement
Amsterdam, The Netherlands, 13 - 14 March 2013, 7th International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components
Editor(s)
Gessner, Thomas
Corporate Author
Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
MESAGO Messe Frankfurt GmbH, Stuttgart
Publisher
Publishing Place
Berlin
Publication Date
2013
ISBN
978-3-8007-3490-0
Conference