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Nanoscale characterization of high-k dielectrics by electrical SPM methods
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2014
Presentation
Title
Nanoscale characterization of high-k dielectrics by electrical SPM methods
Title Supplement
Presentation held at Novel High k Application Workshop, March 24, 2014, Dresden
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Author(s)
Rommel, Mathias
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Conference
Novel High k Application Workshop 2014
DOI
10.24406/publica-fhg-387003
File(s)
N-333061.pdf (2.09 MB)
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Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB