Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600 Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5 mm a synchronized driven MEMS scanner array-consisting of five hybrid assembled MEMS devices-are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3...5 mm at 7.5 m measuring range for a gray target.