Title

MOEMS and miniaturized systems XIII

Title Supplement

3 - 6 February 2014, San Francisco, California, United States

Editor(s)

Piyawattanametha, W.

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2014

Series

Proceedings of SPIE; 8977

ISBN

978-0-8194-9890-8

Conference