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MOEMS and miniaturized systems XIII
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Title
MOEMS and miniaturized systems XIII
Titel Supplements
3 - 6 February 2014, San Francisco, California, United States
Hrsg
Piyawattanametha, W.
Institut
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Verlag
SPIE
Verlagsort
Bellingham, WA
Datum
2014
Serie
Proceedings of SPIE
Konferenz
Conference "MOEMS and Miniaturized Systems" 2014