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Revealing Copper Contamination in Silicon after Low Temperature Treatments
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2009
Conference Paper
Titel
Revealing Copper Contamination in Silicon after Low Temperature Treatments
Author(s)
Polignano, M.
Brivio, J.
Codegoni, D.
Grasso, S.
Altmann, R.
Nutsch, A.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Pavia, G.
Hauptwerk
Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009
Konferenz
Symposium "Analytical Techniques for Semiconductor Materials and Process Characterization" (ALTECH) 2009
Electrochemical Society (Meeting) 2009
DOI
10.1149/1.3204424
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
