• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Revealing Copper Contamination in Silicon after Low Temperature Treatments
 
  • Details
  • Full
Options
2009
Conference Paper
Title

Revealing Copper Contamination in Silicon after Low Temperature Treatments

Author(s)
Polignano, M.
Brivio, J.
Codegoni, D.
Grasso, S.
Altmann, R.
Nutsch, A.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Pavia, G.
Mainwork
Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009  
Conference
Symposium "Analytical Techniques for Semiconductor Materials and Process Characterization" (ALTECH) 2009  
Electrochemical Society (Meeting) 2009  
DOI
10.1149/1.3204424
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024