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Revealing Copper Contamination in Silicon after Low Temperature Treatments
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2009
Conference Paper
Title
Revealing Copper Contamination in Silicon after Low Temperature Treatments
Author(s)
Polignano, M.
Brivio, J.
Codegoni, D.
Grasso, S.
Altmann, R.
Nutsch, A.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Pavia, G.
Mainwork
Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009
Conference
Symposium "Analytical Techniques for Semiconductor Materials and Process Characterization" (ALTECH) 2009
Electrochemical Society (Meeting) 2009
DOI
10.1149/1.3204424
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
