Title

Analytical techniques for semiconductor materials and process characterization 6. ALTECH 2009

Title Supplement
Symposium on "Analytical Techniques for Semiconductor Materials and Process Characterization VI" was held at the 216th meeting of the Electrochemical Society in Vienna from October 4 to 9, 2009
Person Involved
Corporate Author
Electrochemical Society -ECS-, Electronics and Photonics Division
Publisher
Publishing Place
Pennington, NJ
Publication Date
2009
Series
ECS transactions; 25, 3
ISSN
1938-5862
ISBN
978-1-566-77740-7
978-1-60768-090-1
Conference
DDC
660