Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
    Reliability of MEMS devices in shock and vibration overload situations
    ( 2008)
    Kurth, S.
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    Shaporin, A.
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    Hiller, K.
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    Kaufmann, C.
    ;
    Gessner, T.
    This contribution describes the investigation of the reasons for overload failure and overload reaction based on linear vibration theory by decomposition of the complex reaction into resonant mode reactions and on observation of the reaction. An impulse specific peak deflection (ISPD) is derived as a general characteristic property of a certain shock. It is applicable to predict the mechanical deflection of a certain resonant mode of an arbitrary resonant frequency due to a shock. This is further analyzed and proofed by scanning Laser Doppler interferometer (SLDI) measurement on the example of a Fabry Perot interferometer based tunable infrared filter. The results from ISPD prediction are compared to SLDI measurements and to finite element analysis results.
  • Publication
    MEMS based laser display system
    ( 2007)
    Specht, H.
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    Kurth, S.
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    Kaufmann, C.
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    Gessner, T.
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    Dötzel, W.
  • Publication
    Laser-Display-System auf Basis von MEMS-Scannern
    ( 2007)
    Specht, H.
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    Kurth, S.
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    Kaufmann, C.
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    Hahn, R.
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    Dötzel, W.
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    Gessner, T.
    ;
    Mehner, J.
  • Publication
    Performance and reliability test of MEMS optical scanners
    ( 2007)
    Kurth, S.
    ;
    Kaufmann, C.
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    Hahn, R.
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    Mehner, J.
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    Dötzel, W.
    ;
    Gessner, T.
    MEMS scanners are among the devices which have been investigated since the very beginning of MEMS development. The main concern of this paper is to report and discuss suitable measurement techniques and to compare and verify this methods on different scanners for examples. Analysis of scanner reaction based on image processing is covered in a first section. It is shown that an Electronic Speckle Interferometer (ESPI), a Scanning Laser Doppler Interferometer (SLDI) and a phase shift interferometer are suitable for measuring different motion characteristics. The SLDI is used for rapid measurement of FRF at a large number of locations at the scanner. A phase shift interferometer with stroboscopic illumination has been utilized for measuring the deformation of scanners operating them at resonant frequency. Measurement of static displacement and of thermal deformation is the main application of ESPI technique and shown on the example of a galvanometric scanner. A next sectio n is dedicated to functional tests and to qualification of methods for wafer level test. The application of a tilt angle measuring set up containing a position sensitive semiconductor device and a laser diode and of a laser Doppler interferometer is analyzed. Measurement of resonant frequencies in an early production state is the topic of a third section. It provides information about geometry properties of the scanners suspension and about mechanical stress inside suspending torsion or bending beams. Moreover it enables selection of scanner chips with characteristics which do not meet the specification and the cost for packaging of this bad dies is saved.
  • Publication
    A novel 24-kHz resonant scanner for high-resolution laser display
    ( 2005)
    Kurth, S.
    ;
    Kaufmann, C.
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    Hahn, R.
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    Mehner, J.
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    Dötzel, W.
    ;
    Gessner, T.
  • Publication
    Ein resonanter 24 kHz Scanner für hoch auflösende Laserdisplays
    ( 2005)
    Kurth, S.
    ;
    Kaufmann, C.
    ;
    Hahn, R.
    ;
    Mehner, J.
    ;
    Dötzel, W.
    ;
    Gessner, T.
    Entwurf, Herstellung und Test eines mikromechanischen Scanners zur Horizontalablenkung für Laserdisplay werden in diesem Beitrag vorgestellt. Der elektrostatische Antrieb ist bei diesem Scanner von der Reflektorplatte getrennt. Dadurch bildet sich ein mechanischer Resonator mit zwei rotatorischen Freiheitsgraden mit gleichen Drehachsen. Die bei geeigneter Dimensionierung auftretende Amplitudenverstärkung beträgt in diesem Fall 50fach und wird genutzt, um eine relativ dicke und mechanisch stabile Reflektorplatte bei hohen Frequenzen um große Winkel auszulenken. Mit 380V Ansteuerspannung wird bei 24 kHz ±5,5° mechanische Auslenkung erreicht.
  • Publication
    Micromirrors and micromirror arrays for scanning applications
    ( 2000)
    Gessner, T.
    ;
    Kurth, S.
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    Kaufmann, C.
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    Markert, J.
    ;
    Dötzel, W.
    The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.
  • Publication
    Fabrication of high frequency microscanners by using low temperature silicon wafer bonding
    ( 1999)
    Hiller, K.
    ;
    Wiemer, M.
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    Hahn, R.
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    Kaufmann, C.
    ;
    Kurth, S.
    ;
    Kehr, K.
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    Gessner, T.
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    Dötzel, W.
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    Milekhin, A.
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    Friedrich, M.
    ;
    Zahn, D.
  • Publication
    Anwendung von Niedertemperatur-Bondverfahren für die Herstellung von Microscanner-Arrays hoher Frequenz
    ( 1999)
    Wiemer, M.
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    Hiller, K.
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    Hahn, R.
    ;
    Kaufmann, C.
    ;
    Kurth, S.
    ;
    Kehr, K.
    ;
    Gessner, T.
    ;
    Dötzel, W.
  • Publication
    Analogously working micromirror arrays
    ( 1999)
    Kehr, K.
    ;
    Kurth, S.
    ;
    Mehner, J.
    ;
    Kaufmann, C.
    ;
    Hahn, R.
    ;
    Dötzel, W.
    ;
    Gessner, T.