Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM

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  • Publication
    XPS studies of thin polycyanurate films on silicon wafers and aluminium substrates
    ( 1995)
    Dieckhoff, S.
    ;
    Schlett, V.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    The fundamental understanding of the chemical and physical phenomena of the adhesion at substrate/polymer interfaces is of great importance in order to be able to solve and control adhesion problems. We used a prepolymer of the diandicyante of bisphenol A (DCBA) as a model of a network polymer. The adsorption of thin DCBA-prepolymer films on silicon and aluminium substrates is studied by x-ray photoelectron spectroscopy (XPS), infrared spectrscopy (IR) and ellipsometry.
  • Publication
    AFM investigations of the initial stages of prepolymer film growth on aluminium
    ( 1995)
    Gesang, T.
    ;
    Höper, R.
    ;
    Dieckhoff, S.
    ;
    Fanter, D.
    ;
    Hartwig, A.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    A cyanurate prepolymer was applied to aluminium coated silicon wafers by adsorption out of solution. Film growth from the initial stages to closed films was studied by Atomic Force Microscopy (AFM). Sample preparation in the presence of external forces (spin coating) leads to film morphologies very different from adsorption near equilibrium (dip coating). The edge of the non closed films can be characterized by means of a borderline angle. The influence of specific prepolymer - substrate interactions, external forces and substrate topography is discussed. The formation of ultrathin, amorphous organic films on solids is studied for an application oriented model system. A prepolymer or a copolymer of a cyanate based high temperature adhesive is spin cast or dip coated onto silicon wafers or aluminium coatings to produce films as thin as possible. The mean thickness ranges from 1 - 4 nm. After a thorough substrate characterization by imaging and spectroscopic methods, the various films we re investigated by atomic force microscopy. Besides imaging, for discontinuous films atomic force microscopy was also utilized to measure the 'borderline angle' introduced in this paper. The borderline angle characterizes the slope of the surface of an isolated adsorbed organic object near the substrate. Thus, it is the geometric equivalent to the classical contact angle of a lying liquid drop. However, the phenomena leading to these angles are different. Nevertheless, the borderline angle is related to the affinity of the organic phase to the substrate an d thus will play an important role in future investigations of film formation and adhesion on the nanometer scale.
  • Publication
    XPS studies of thin polycyanurate films on silicon wafers
    ( 1995)
    Dieckhoff, S.
    ;
    Schlett, V.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    Tomographic scanners are classified by various parameters, and two which are important are the geometric resolution and the contrast resolution. A numerical study has been reported previously on the application of certain estimates of theoretical error in the tomographic inversion formula. This study deals with the experimental aspects of those error estimates, and further consolidates the findings of the previous work in representing contrast by a mathematical quantity related to the object cross-section. Thin films of a diandicyanato bisphenol A (DCBA) prepolymer on silicon substrates have been investigated. Angle dependend X-ray photoelectron spectroscopy reveals some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate surface.
  • Publication
    Organic film formation investigated by atomic force microscopy on the nanometer scale
    ( 1995)
    Gesang, T.
    ;
    Höper, R.
    ;
    Dieckhoff, S.
    ;
    Schlett, V.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
  • Publication
    Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
    ( 1995)
    Gesang, T.
    ;
    Höper, R.
    ;
    Dieckhoff, S.
    ;
    Hartwig, A.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    A cyanurate prepolymer was applied to smooth silicon wafers or to distinctly structured aluminum coatings. The surface composition of the substrates was investigated by X-ray Photoelectron Spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Ellipsometry. The application methods, spin coating and dip coating represent adsorption by a technical process exerting significant shear stresses or nearly equilibrated conditions, respectively. The mean thickness of the prepolymer film was adjusted by variation of the concentration of the solution and checked by ellipsometry. Atomic Force Microscopy (AFM) monitored the development of the respective film morphologies of all 4 systems (silicon / aluminum, spin / dip coating) in the mean film thickness range from 1 to 50 nm.
  • Publication
    Adsorption and growth of polycyanurate films on silicon wafers and aluminium substrates
    ( 1994)
    Dieckhoff, S.
    ;
    Schlett, V.
    ;
    Possart, W.
    ;
    Hennemann, O.-D.
    We have investigated thin films of a DCBA prepolymer on Si and Al substrates. High-resolution Cls, Ols and Nls x-ray photoelectron spectra reveal some thickness-dependent features, which lead to an adsorption model for the DCBA prepolymer molecules. The adsorption of the first layer is governed by the interaction of the triazine rings with the substrate interface.