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Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
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PatentVorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes( 1998)
;Koerner, K. ;Fritz, H. ;Nyarsik, L. ;Spur, G.Uhlmann, E.The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation. -
PublicationOptische Messung der Ebenheitsabweichung, Makro- und Mikrowelligkeit an Dünngläsern für die Displayherstellung( 1997)
;Körner, K. ;Nyarsik, L. ;Fritz, H.Fuchs, H. -
PublicationGLATOM-Grundlagenuntersuchungen zur Analyse und Modellierung Technischer Oberflächen mit kombinativer Lasermeßtechnik. Teilvorhaben: Shear-kompensierte, hochauflösende Topographie-Messung mittels Schäglicht-Meßtechnik, F&E-Vorhaben 13N6700/1. 2. Zwischenbericht(IPK, 1997)
;Körner, K. ;Nyarsik, L.Fritz, H. -
PublicationOptische Messungen an Dünngläsern für die Displayherstellung( 1997)
;Körner, K. ;Nyarsik, L. ;Fritz, H.Fuchs, H. -
PublicationMikrostrukturen im Visier. Laser-Meßtechnik für die Dünnglasprüfung( 1996)
;Körner, K. ;Nyarsik, L. ;Fritz, H.Fuchs, H. -
PublicationGrazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces( 1993)
;Spur, G. ;Körner, K. ;Nyarsik, L. ;Fritz, H.Uhlmann, E.A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed. -
PublicationEvaluation of interference patterns in a prism interferometer( 1993)
;Spur, G. ;Nyarsik, L. ;Körner, K.Fritz, H.Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed. -
PatentVerfahren und Anordnung zur Messung der Mikrogestalt technischer Oberflaechen( 1989)
;Koerner, K.Fritz, H.The invention relates to a process and an arrangement for the measurement of the microstructure of industrial surfaces according to the principle of the interference microscope. According to the invention, the virtual mirror planes existing in the object and reference beam chamber are projected by a different offset in optical conjugation; the location of the beam splitting and recombination are spatially separated and a correction is performed in such a way that the object and reference ray bundles propagate in a common beam chamber in parallel to each other. This makes it possible to eliminate any undesired circular interference structures which may occur during the interferometric measurement and makes a body reference surface superfluous.