Title

Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes
Date Issued
1998
Author(s)
Koerner, K.
Fritz, H.
Nyarsik, L.
Spur, G.
Uhlmann, E.
Patent No
1993-4313057
1993-4313061
1993-4334388
Abstract
The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.
Language
de
Institute
Link
Patenprio
DE 1993-4313057 A1: 19930421