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Patent
Title
Vorrichtung und Verfahren zur Pruefung der Gestalt einer Oberflaeche eines zu vermessenden Objektes
Other Title
Process and device for the topographical inspection of surfaces
Abstract
The description relates to a device for the topographical inspection of the surfaces of an object to be tested. The invention is characterized by the fact that it comprises the following components: - at least one light source, - at least one light-distributing surface, - at least one projection stage and - one detector for electromagnetic radiation.
Inventor(s)
Koerner, K.
Fritz, H.
Nyarsik, L.
Spur, G.
Uhlmann, E.
Patent Number
1993-4313057
1993-4313061
1993-4334388
Publication Date
1998
Language
German