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1993
Conference Paper
Title
Evaluation of interference patterns in a prism interferometer
Abstract
Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed.
Language
English
Keyword(s)
Abbildungseigenschaft
anamorphic optical imaging characteristic
anamorphotisches optisches element
element
grazing incidence illumination
interferometric increment
interferometrisches Inkrement
macro profile
Makroprofil
micro structure
Mikrostruktur
prism interferometer
Prismeninterferometer
Schräglichtbeleuchtung