2016
Conference Proceeding
Title

Gettering and defect engineering in semiconductor technology XVI

Title Supplement
Selected, peer reviewed papers from the GADEST 2015: Gettering and Defect Engineering in Semiconductor Technology, September 20-25, 2015, Bad Staffelstein, Germany
Editor(s)
Pichler, Peter  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Publisher
Publishing Place
Dürnten
Funder
Conference
DOI
Language
English