2001
Conference Proceeding
Title

Proceedings of the 6th Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Person Involved
Sundaram, K.
Deen, M.J.
Landherr, D.
Brown, W.D.
Misra, D.
Sah, R.E.
Publisher
Publishing Place
New Jersey
Conference
Language
German