Correction: Process data-driven machine learning for non-uniformity prediction and virtual metrology in chemical mechanical planarization (Journal of Intelligent Manufacturing, (2025), 10.1007/s10845-025-02753-8)

Correction To: Journal of Intelligent Manufacturing. https://doi.org/10.1007/s10845-025-02753-8 In this article, the last sentence under the section “Experiments” inadvertently included the term “Table 1.” In the next section, Aggregation of Multivariate Time Series, the third sentence used “Table 4.1” instead of “Table 1.” These have now been corrected.