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2023
Conference Paper
Title
High-performance EUV Ptychography at 13.5 nm
Abstract
We present table-top high-speed EUV ptychography at 13.5 nm. Employing a novel sCMOS detector enables 5x faster wide-field imaging with an imaging speed of 4.6 Mpix/h. Further, Hertz-scale high-resolution EUV wavefront sensing is demonstrated.
Author(s)