Feedback Control of a Two-Degree-of-Freedom Electromagnetic Reluctance Precision Motion System

This study investigates a novel Xθ actuation system driven by a reluctance actuator (RA) and two accompanying moving magnet actuators (MMAs). The system enables precise control of both translational (x) and rotational (θ) motion, offering a two-degree-of-freedom (2DOF) solution for high-precision applications. The two MMAs introduce additional force and torque dynamics through the solenoid and permanent magnet (PM) pairs. Flexure hinges assist with the retraction force of the mover element, providing the necessary stiffness without introducing frictional effects. The system was modeled analytically, optimized, and validated experimentally with a developed feedback and feedback control, achieving steady-state errors of approximately ±7 μm in x translation and ±0.3 mrad in θ rotation which can be attributed to systematic errors in the sensor itself. The most relevant application is the fastscan mirror in extreme ultraviolet (EUV) lithography where specific targeted rotational and translational trajectories can benefit light beam positioning, such as wavefront corrections. This system allows translation and rotation specifications to be realized in one actuation unit, opening up more design possibilities for controlling precision motion systems.