Towards Integrated 3D Microbatteries: Study of LiPON on Porous Electrodes

The demand for higher surface and energy densities in 3D all-solid-state microbatteries (ASSMB) is increasing. The state-of-the-art primarily involves thin film batteries, in which the 3D aspect is achieved by deposition of solid-state electrodes and electrolytes on high aspect ratio structures, such as nanotubes or finger-like structures. Our aim is to develop 3D powder-based electrodes for substrate-integrated microbatteries by mimicking the electrode fabrication in macrobatteries. Here, lithium phosphorous oxynitride (LiPON) is used as a solid-state electrolyte on porous powder-based electrodes. The study demonstrates the successful solidification of electrode powders by LiPON thin films.