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2023
Conference Paper
Title
Piezoelectric MEMS actuators based on ferroelectric aluminum-scandium-nitride double layers Piezoelektrische MEMS-Aktuatoren basierend auf ferroelektrischen Aluminium-Scandium-Nitrid Doppellagen
Abstract
This paper presents a free standing piezoelectric double layer cantilever based on the permanent polarization inversion in ferroelectric Aluminum-Scandium-Nitride (AlScN). For this an AlScN double layer with a Scandium content of 27 % was deposited on a SOI similar substrate with a reactive co-sputtering process. The material stack was structured sequentially and subsequently characterized with Double-Beam-Laser-Interferometry (DBLI) and a Doppler-Laser-Vibrometer (LDV).
Author(s)
Mainwork
Mikrosystemtechnik Kongress 2023 Mikroelektronik Mikrosystemtechnik Und Ihre Anwendungen Nachhaltigkeit Und Technologiesouveranitat Proceedings
Conference
MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat MicroSystems Technology Congress 2023: Microelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty