Miniaturized annular arrays for focused ultrasound

Focused ultrasound can be utilized in diagnostic and therapeutic applications, such as imaging, neurostimulation or cancer treatment. Miniaturized annular arrays combine the advantages of compactness, low electronic complexity, and variable depth treatment for in-situ and point-of-care examinations in medical and also industrial applications. In this work, we developed models, design specifications, manufacturing processes and a realized assembly concept for waterproof modular annular array probes based on capacitive micromachined ultrasonic transducers (CMUTs). Resonance frequencies from about 3.5 MHz to 9.5 MHz were measured in air verifying the model results.