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  4. Physics-based differentiable simulation framework for power optimization in parallel two-photon polymerization
 
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2025
Conference Paper
Title

Physics-based differentiable simulation framework for power optimization in parallel two-photon polymerization

Abstract
Two-photon polymerization (TPP) enables high-resolution additive manufacturing at the microscale, but accurate control of voxel shape remains a challenge due to nonlinear exposure dynamics and complex resist behavior. We present a physics-based differentiable model of the TPP process that includes radical generation, oxygen quenching, polymerization and development. The model is implemented in PyTorch and allows optimization of laser power using gradient-based backpropagation. Experimental validation is performed using a setup with a diffractive optical element (DOE) that enables parallel voxel exposure. This parallelization improves throughput but introduces proximity effects when several voxels are written close to each other. We show that the optimization technique compensates for these effects, resulting in better agreement between simulated and printed structures.
Author(s)
Sedova, Valeriia
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Yu, Yuan
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Deun, Thomas le
IMT Atlantique
Rovera, Joel
IMT Atlantique
Wiedenmann, Jonas
Heidelberg Instruments Mikrotechnik GmbH
Heggarty, Kevin J.
IMT Atlantique
Erdmann, Andreas  
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Mainwork
40th European Mask and Lithography Conference, EMLC 2025  
Conference
European Mask and Lithography Conference 2025  
DOI
10.1117/12.3062740
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • computational modeling

  • metasurfaces

  • two-photon lithography

  • two-photon polymerization

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