Additively Manufactured Material Measures for Resolution Determination in Optical Surface Texture Measurement

The accurate determination of topographic resolution in surface texture measurement is fundamental for quality assessment in advanced manufacturing. ISO 25178 provides multiple criteria and material measures for resolution determination. We assess and compare different material measures and evaluation criteria using a Quantum X direct laser writing system for manufacturing. The manufactured material measures include features with varying geometrical complexities, enabling different evaluations of the instrument's resolution performance. To compare the suitability of the different approaches, including star-shaped gratings and various forms of chirp material measures, distinct optical measurement principles - confocal microscopy, and white light interferometry, just as well as an atomic force microscopy (AFM) sensor are utilized. Each method is examined regarding its capability to detect the smallest features of the samples, comparing their strengths and limitations in the context of resolution determination. The comparison of different measuring principles ensures the fidelity of the fabricated samples and allows for cross-validation of the results. The integration of advanced manufacturing and metrology approaches enables a deeper understanding of the interaction between manufacturing and metrological resolution and is used to derive guidelines for resolution determination and enhancement. The findings of this study highlight the potential of additively manufactured material measures as a versatile tool for benchmarking measuring instruments and advancing the field of geometrical product specification. It can be demonstrated that the calibration using additively manufactured material measures is a suitable approach for both examined measuring principles. The described processes provide a framework for improving measurement reliability and precision in industrial and research applications.