Discharge Currents of Metallized Silicon Chiplets at Low Pre-Charge Voltages

This paper presents a new current sensor, which incorporates two microstrip lines: one designed for charging the device under test (DUT) and the other facilitating precise discharges into a 33 GHz oscilloscope. Using a fully automated measurement setup with an incorporated pick and place tool, we aim to gather extensive statistical data across three distinct die sizes. The study focuses on low pre-charge voltages between 2 V and 100 V to address current and future discharge target levels for components used in advanced packaging. It helps to establish the link between voltages and discharge currents for both ESD protection design and ESD process control.