Impact of the Series Resistance on Switching Characteristics of 1T1R HfO2-based RRAM Devices

This study investigates the influence of the series resistance (RS) on the switching characteristics of 1-transistor-1-resistor (1T1R) RRAM devices based on HfO2 and Al:HfO2 dielectrics. Intrinsic RS values were extracted from I-V characteristics measured over 50 Reset-Set cycles at various gate voltages (VG) by using a numerical transformation method. Results reveal the contribution of the transistor’s resistance to the overall RS. A linear relationship between RS values and Set transition voltages (VTS) was found, with larger RS values amplifying the variability in switching parameters. Comparative analysis of cumulative distribution functions (CDFs) highlights differences between technologies, showing lower VTS values as well as lower sensitivity to RS for Al:HfO2-based devices. These findings underscore the critical role of RS in modeling and optimizing the performance of RRAM devices for reliable operation.