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August 6, 2024
Poster
Title
Comparative study of ZrAlxOy - based MIM decoupling capacitors with high-κ dielectric grown by 3 generations of metalorganic ALD Zr-precursors
Title Supplement
Poster presented at 24th International Conference on Atomic Layer Deposition, 4-7 August 2024, Helsinki
Author(s)
File(s)
Rights
Use according to copyright law
Language
English