Fast and precise mechanical characterization of ultra-thin films using fully integrated laser-induced surface acoustic wave spectroscopy (LAwave)

Surface acoustic wave spectroscopy is established for the rapid and non-destructive characterization of ul-tra-thin coatings. The analysis of surface wave speed as a function of frequency enables precise information about the physical properties of coatings. A typical application is the measurement of the Young’s modulus providing information on coating production and processing, and related material properties, such as mor-phology, defects and composition. The poster introduces a fully integrated measuring system with user-friendly operating software. Such devices have been successfully installed worldwide in industry (mainly microelectronics, automotive) and in the research landscape. The measurement principle and the benefits, limitations and future developments are explained using actual examples of thin inorganic films from ALD and sputtering. Influences of pretreatment, thickness, defects and pore structure are illustrated. Finally, a comparison with nanoindentation will be presented.